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High resolution SEM of carbon micro - and nanostructures prepared in microwave discharge

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Original title:High resolution SEM of carbon micro - and nanostructures prepared in microwave discharge
Authors:Jiřina Matějková, Marek Eliáš, Ondřej Jašek, Zdeněk Frgala, Martin Bublan, Lenka Zajíčková, Antonín Rek
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Original language:English
Field:Plasma physics
Type:Article in Proceedings
Keywords:scanning electron microscopy; carbon microstructures;carbon nanostructures; microwave discharge

Two different carbon structures, carbon nanotubes (CNTs) and crystalline diamond films, were studied by a high resolution scanning electron microscope (SEM). Both forms of carbon were prepared by plasma enhanced chemical vapor deposition (PECVD) in microwave discharges.SEM observation of nanotubes were made by the high performance field emission SEM using SEI mode electron images. No charging effects were observed.

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