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Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers

Basic information
Original title:Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers
Authors:Lenka Zajíčková, Zuzana Kučerová, Daniel Franta, Vilma Buršíková, Jiří Buršík, Pavel Sťahel, Petr Klapetek
Further information
Citation:ZAJÍČKOVÁ, Lenka, Zuzana KUČEROVÁ, Daniel FRANTA, Vilma BURŠÍKOVÁ, Jiří BURŠÍK, Pavel SŤAHEL a Petr KLAPETEK. Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers. In 18th International Symposium on Plasma Chemistry. Kyoto: International Plasma Chemistry Society, 2007. s. 459.Export BibTeX
@inproceedings{747827,
author = {Zajíčková, Lenka and Kučerová, Zuzana and Franta, Daniel and Buršíková, Vilma and Buršík, Jiří and Sťahel, Pavel and Klapetek, Petr},
address = {Kyoto},
booktitle = {18th International Symposium on Plasma Chemistry},
keywords = {PECVD; HMDSO; OMCTS},
language = {eng},
location = {Kyoto},
pages = {459-459},
publisher = {International Plasma Chemistry Society},
title = {Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers},
year = {2007}
}
Original language:English
Field:Plasma physics
Type:Article in Proceedings
Keywords:PECVD; HMDSO; OMCTS

Siloxane polymers prepared by chemical methods are characterized by high flexibility, gas permeability and low surface energy. Due to their properties they find many applications in medicine and other fields. A little bit different group of materials are organosilicon films prepared by plasma enhanced chemical vapor deposition (PECVD) combining chemical and physical approaches. Monomers used in PECVD include usually hexamethyldisiloxane (HMDSO) and tetraethoxysilane (TEOS) often mixed with O$_2$ for deposition of inorganic SiO$_2$-like films. Rarely, some other monomers like octamethyltetrasiloxane (D$_4$) are applied but, in PECVD, their structure is usually not retained because of their substantial dissociation. As a result, highly cross-linked polymers in which a repetition unit is not well defined are deposited. However, it can be modified by using pulsed plasmas in which the processes are driven by energetic electrons and ions during an on-time whereas free radicals and activated surface play an important role in an off-time phase. Changing the on-time and off-time a different retention of monomer structure can be achieved.

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