The instrumented indentation test - powerful tool in development of new materials
|Field:||Solid matter physics and magnetism|
|Type:||Article in Proceedings|
The instrumented indentation test combined with AFM measurements was used to evaluate the mechanical properties of plasma deposited thin films. The aim of the present work is to introduce the instrumented indentation technique as a very powerful tool in research and development of new materials. The aim of the present article is to show, that this technique is useful not only for determination of the hardness and elastic modulus, it can be used also for quantification of the fracture toughness, intrinsic stress and the interfacial fracture toughness between the film and the substrate.