Publication details
PLASMA-SURFACE INTERACTION EFFECTS DURING ATMOSPHERIC PRESSURE PLASMA MODIFICATION OF SILICON
| Authors | |
|---|---|
| Year of publication | 2014 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | The aim of this work is to study the characterization of plasma-surface interaction of silicon in DCSBD plasma. The influence of the plasma, generated in ambient air on the silicon surface properties with respect to the filamentary nature of DCSBD was studied. Surface properties and chemical composition of silicon were studied by SEM and EDX, respectively. The experimental data were successfully supported by the modeling. |