Publication details
Imaging in NIR *SOI, GaN
| Authors | |
|---|---|
| Year of publication | 2014 |
| MU Faculty or unit | |
| Description | *Tools for imaging of interferences in thin layers. Completed prototype of equipment for imaging of interferences on 150 mm GaN on Si and 150 and 200 mm SOI wafers. Validate the method and equipment with analysis of SOI and GaN wafers (comparison of thickness maps with FTIR and SEM values. Prepare basic technical documentation, working instructions, recipes and metrological instructions. |