Strain Engineering in Highly Mismatched SiGe/Si Heterostructures

• Authors: ISA Fabio; JUNG Arik; SALVALAGLIO Marco; DASILVA Yadira Arroyo Rojas; MAROZAU Ivan; MEDUŇA Mojmír; BARGET Michael; MARZEGALLI Anna; ISELLA Giovanni; ERNI Rolf; PEZZOLI Fabio; BONERA Emiliano; NIEDERMANN Philippe; SEREDA Olha; GRONING Pierangelo; MONTALENTI Francesco; VON KAENEL Hans
• Year of publication: 2017
• Type: Article in Periodical
• Magazine / Source: Materials Science in Semiconductor Processing
• MU Faculty or unit: Faculty of Science
• Web: http://www.sciencedirect.com/science/article/pii/S1369800116303201?via%3Dihub
• Doi: http://dx.doi.org/10.1016/j.mssp.2016.08.019
• Field: Solid matter physics and magnetism
• Keywords: Strain engineering; Dislocations; Elastic relaxation; Patterned substrates; SiGe
• Description: In this work we present an innovative approach to realise coherent, highly-mismatched 3-dimensional heterostructures on substrates patterned at the micrometre-scale.