Lattice tilt and strain mapped by X-ray scanning nanodiffraction in compositionally graded SiGe/Si microcrystals

• Authors: MEDUŇA Mojmír; ISA Fabio; JUNG Arik; MARZEGALLI Anna; ALBANI Marco; ISELLA Giovanni; ZWEIACKER Kai; MIGLIO Leo; VON KÄNEL Hans
• Year of publication: 2018
• Type: Article in Periodical
• Magazine / Source: Journal of Applied Crystallography
• MU Faculty or unit: Faculty of Science
• Web: https://onlinelibrary.wiley.com/iucr/doi/10.1107/S1600576718001450
• Doi: http://dx.doi.org/10.1107/S1600576718001450
• Field: Solid matter physics and magnetism
• Keywords: scanning X-ray nanodiffraction; lattice bending; graded SiGe microcrystals; strain relaxation
• Description: The scanning X-ray nanodiffraction technique is used to reconstruct the three- dimensional (3D) distribution of lattice strain and Ge concentration in compositionally graded Si1-xGex microcrystals epitaxially grown on Si pillars.

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