Spatial-resolved optical emission spectroscopy of the spoke in non-reactive HiPIMS

• Authors: ŠLAPANSKÁ Marta; KROKER Michael; HNILICA Jaroslav; KLEIN Peter; VAŠINA Petr
• Year of publication: 2021
• Type: Article in Proceedings
• Conference: 23rd Symposium on Application of Plasma Processes, Book of Contributed Papers
• MU Faculty or unit: Faculty of Science
• Web: http://neon.dpp.fmph.uniba.sk/sapp/
• Keywords: HiPIMS, ionisation zones, spokes, optical emission spectroscopy, titanium

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