Influence of discharge and substrate parameters on PECVD of TEOS/argon mixtures

• Authors: ZAJÍČKOVÁ Lenka; BURŠÍKOVÁ Vilma; JANČA Jan
• Year of publication: 1997
• Type: Article in Proceedings
• Conference: ICPIG XXIII
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Description: Influence of discharge and substrate parameters on PECVD of TEOS/argon mixtures

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