Publication details
Plazmová depozice ochranných vrstev na bázi uhlíku
| Title in English | PECVD of protection coatings containing carbon |
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| Authors | |
| Year of publication | 1999 |
| Type | Article in Proceedings |
| Conference | Materiálové vědy na prahu 3. milénia |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | PECVD; carbon; DLC; DLC:Si |
| Description | Carbon films were deposited in capacitively coupled rf glow discharge from several different mixtures on silicon substrates. We compared optical properties in UV-VIS range of diamond like films deposited from mixture of methane and argon with these for carbon films deposited from HMDSO/methane and HMDSO/methane/Ar feeds. |
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