Mode Transition in Low-pressure RF Capacitive Discharge in Nitrogen

• Authors: DVOŘÁK Pavel; ZAJÍČKOVÁ Lenka
• Year of publication: 2002
• Type: Article in Proceedings
• Conference: Europhysics Conference Abstracts 26B
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: discharge modes plasma nitrogen
• Description: Two different plasma modes of capacitive coupled rf discharge in pure nitrogen were studied. the modes differed significantly in a visual appearance, plasma potential and in the shape of the electron energy distribution function. For the plasma diagnostics we used Langmuir probe, Plasma Process Monitor, optical emission spectroscopy and we carried out electrical measurements on reactor with the discharge.

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