Deposition of polymer films in diffuse coplanar surface discharge

• Authors: ŠIMOR Marcel; SŤAHEL Pavel; BRABLEC Antonín; NAVRÁTIL Zdeněk; KOVÁČIK Dušan; ZÁHORANOVÁ Anna; BURŠÍKOVÁ Vilma; ČERNÁK Mirko
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: Proceedings of 16th ISPC
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Deposition; polymer films;coplanar discharge
• Description: Deposition of polymer films in diffuse coplanar surface discharge

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