Publication details
Band structure of diamond-like carbon films assessed from optical measurements in wide spectral range
| Authors | |
|---|---|
| Year of publication | 2010 |
| Type | Article in Periodical |
| Magazine / Source | Diamond and Related Materials |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Band structure |
| Description | The sample of hydrogenated DLC on c-Si prepared by PECVD technique was investigated by ellipsometry in the NIR-UV range (0.6-6.5 eV), synchrotron ellipsometry in the UV-XUV range (4-20 eV) and reflectometry in NIR-UV range (1.24-6.5 eV). Various dispersion models based on the parametrization of density of states (PDOS) were investigated concerning their application in wide spectral range extending to XUV. In conclusion, the further developed PDOS model demonstrated its applicability to correct the calculation of the dielectric response of hydrogenated DLC material in the wide spectral range. Naturally, it can be used for any other disordered materials and it will, together with the optical measurements extended to XUV, bring important information about their band structure. |
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