Deposition and characterization of nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD

• Authors: SOUČEK Pavel; EL MEL Abdelazziz; TESSIER Pierre-Yves; ELIÁŠ Marek; BURŠÍKOVÁ Vilma; VAŠINA Petr
• Year of publication: 2010
• Type: Article in Proceedings
• Conference: Potencial and Application of Nanotreatment of Medical Surfaces
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: magnetron sputtering; coating; nanocomposite; mechanical properties
• Description: Several micrometers thick nc-TiC/a-C:H films were prepared by sputtering of the Ti target in a mixture of argon and acetylene gases. Polished steel substrates were used to come close to industrial conditions of usage of such films. The initial temperature of the steel substrates was found to have a significant impact on the quality of the deposited nc-TiC/a-C:H films.

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