Defect Engineering in Czochralski-grown Silicon Studied by TEM

• Authors: SVOBODA Milan; BURŠÍK Jiří; MEDUŇA Mojmír; CAHA Ondřej; KUBĚNA Josef
• Year of publication: 2010
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: As a part of a complex study of nucleation and growth of oxygen precipitates in Czochralski-grown silicon this work reports our latest results obtained by TEM.

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