Characterization of ultrananocrystalline diamond thin films using low energy scanning electron microscopy

• Authors: ŠPERKA Jiří; ZAJÍČKOVÁ Lenka; JAŠEK Ondřej; DVOŘÁK Pavel; MIKMEKOVÁ Šárka; SCHÄFER Jan
• Year of publication: 2011
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: This paper deals with the low energy scanning electron microscopy characterization of ultrananocrystalline diamond films. These films were prepared by plasma enhanced chemical vapor deposition (PECVD) using dual frequency discharge.

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