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GAGG:Ce single crystalline films: New perspective scintillators for electron detection in SEM.

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BOK Jan LALINSKÝ Ondřej HANUŠ Martin KELAR Jakub ONDERIŠINOVÁ Zuzana KUČERA Miroslav

Rok publikování 2016
Druh Článek v odborném periodiku
Časopis / Zdroj Ultramicroscopy
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www http://www.sciencedirect.com/science/article/pii/S0304399116300031
Doi http://dx.doi.org/10.1016/j.ultramic.2016.01.003
Obor Fyzika pevných látek a magnetismus
Klíčová slova Scintillator; GAGG:Ce; Multicomponent garnet; Epitaxial film; Electron detection; SEM
Přiložené soubory
Popis Single crystal scintillators are frequently used for electron detection in scanning electron microscopy (SEM). We report gadolinium aluminum gallium garnet (GAGG:Ce) single crystalline films as a new perspective scintillators for the SEM. For the first time, the epitaxial garnet films were used in a practical application: the GAGG:Ce scintillator was incorporated into a SEM scintillation electron detector and it showed improved image quality. In order to prove the GAGG:Ce quality accurately, the scintillation properties were examined using electron beam excitation and compared with frequently used scintillators in the SEM. The results demonstrate excellent emission efficiency of the GAGG:Ce single crystalline films together with their very fast scintillation decay useful for demanding SEM applications.

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