Publication details
Optical characterization of sol
-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions
| Basic information | |
|---|---|
| Original title: | Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions |
| Authors: | Daniel Franta, Ivan Ohlídal, Jan Mistík, Tomuo Yamaguchi, Gu Jin Hu, Ning Dai |
| Further information | |
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| Citation: | FRANTA, Daniel, Ivan OHLÍDAL, Jan MISTÍK, Tomuo YAMAGUCHI, Gu
Jin HU and Ning DAI. Optical characterization of sol-gel
deposited PZT thin films by spectroscopic ellipsometry and
reflectometry in near-UV and visible regions. Applied Surface
Science, USA: ELSEVIER (NORTH-HOLLAND), 2005, vol. 244, 1-4, p.
338-342. ISSN 0169-4332.Export BibTeX @article{621464, author = {Franta, Daniel and Ohlídal, Ivan and Mistík, Jan and Yamaguchi, Tomuo and Hu, Gu Jin and Dai, Ning}, article_location = {USA}, article_number = {1 -4},keywords = {PZT films; Optical constants; Ellipsometry; Reflectometry}, language = {eng}, issn = {0169 -4332},journal = {Applied Surface Science}, title = {Optical characterization of sol -gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions},url = {http://hydra.physics.muni.cz/~franta/bib/ASS244_338.html}, volume = {244}, year = {2005} } |
| Original language: | English |
| Field: | Solid matter physics and magnetism |
| WWW: |  http://hydra.physics.muni.cz/~franta/bib/ASS244_338.html |
| Type: | Article in Periodical |
| Keywords: | PZT films; Optical constants; Ellipsometry; Reflectometry |
In this paper the results concerning the optical characterization of the PZT film are presented. The multi-sample modification of the optical method based on combining variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used to obtain the spectral dependences of the optical constants of this film within the spectral region 190-1000 nm. Within the near-UV region the sharp features of the spectral dependences of the optical constants are found. These features are explained by the existence of the narrow bands of the 4d and 3d valence electrons of the transition metals Zr and Ti. Within the optical characterization of the PZT film the defects consisting of boundary roughness and refractive index profile are respected.
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