Publication details

 

Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions

Basic information
Original title:Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions
Authors:Daniel Franta, Ivan Ohlídal, Jan Mistík, Tomuo Yamaguchi, Gu Jin Hu, Ning Dai
Further information
Citation:FRANTA, Daniel, Ivan OHLÍDAL, Jan MISTÍK, Tomuo YAMAGUCHI, Gu Jin HU a Ning DAI. Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions. Applied Surface Science, USA: ELSEVIER (NORTH-HOLLAND), 2005, roč. 244, 1-4, s. 338-342. ISSN 0169-4332.Export BibTeX
@article{621464,
author = {Franta, Daniel and Ohlídal, Ivan and Mistík, Jan and Yamaguchi, Tomuo and Hu, Gu Jin and Dai, Ning},
article_location = {USA},
article_number = {1-4},
keywords = {PZT films; Optical constants; Ellipsometry; Reflectometry},
language = {eng},
issn = {0169-4332},
journal = {Applied Surface Science},
title = {Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions},
url = {http://hydra.physics.muni.cz/~franta/bib/ASS244_338.html},
volume = {244},
year = {2005}
}
Original language:English
Field:Solid matter physics and magnetism
WWW:link to a new windowhttp://hydra.physics.muni.cz/~franta/bib/ASS244_338.html
Type:Article in Periodical
Keywords:PZT films; Optical constants; Ellipsometry; Reflectometry

In this paper the results concerning the optical characterization of the PZT film are presented. The multi-sample modification of the optical method based on combining variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used to obtain the spectral dependences of the optical constants of this film within the spectral region 190-1000 nm. Within the near-UV region the sharp features of the spectral dependences of the optical constants are found. These features are explained by the existence of the narrow bands of the 4d and 3d valence electrons of the transition metals Zr and Ti. Within the optical characterization of the PZT film the defects consisting of boundary roughness and refractive index profile are respected.

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