Informace o publikaci
Predictive simulation of antenna effect in PVD processes using fluid models
| Autoři | |
|---|---|
| Rok publikování | 2019 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | SURFACE & COATINGS TECHNOLOGY |
| Fakulta / Pracoviště MU | |
| Citace | |
| www | https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369 |
| Doi | http://dx.doi.org/10.1016/j.surfcoat.2019.125045 |
| Klíčová slova | PVD; Antenna effect; Edge effect; Vacuum arc; Titanium nitride; Simulation; Model |
| Popis | We present numerical simulation of an ion-based physical vapor deposition coating process on a realistic part. The simulation is performed using a fluid model. By correlating the simulated ion flux to the surface of the coated part with experimentally measured thickness of the coating at the same conditions, it is shown that the model is capable of capturing the so-called antenna effect (edge effect). This local increase of coating thickness close to sharp edges of the part is a consequence of the plasma sheath of a negatively biased coated part. Additionally, we assess the sensitivity of the model to the boundary conditions imposed. |