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Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates

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DVOŘÁK Jan VOHÁNKA Jiří BURŠÍKOVÁ Vilma FRANTA Daniel OHLÍDAL Ivan

Rok publikování 2023
Druh Článek v odborném periodiku
Časopis / Zdroj Coatings
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www https://www.mdpi.com/2079-6412/13/5/873
Doi http://dx.doi.org/10.3390/coatings13050873
Klíčová slova optical characterization; inhomogeneous thin films; non-absorbing substrates; dual-side measurements; spectroscopic ellipsometry; spectrophotometry; polymer-like thin films; optical properties
Popis In this study, a novel approach for characterizing the optical properties of inhomogeneous thin films is presented, with a particular focus on samples exhibiting absorption in some part of the measured spectral range. Conventional methods of measuring the samples only from the film side can be limited by incomplete information at the lower boundary of the film, leading to potentially unreliable results. To address this issue, depositing the thin films onto non-absorbing substrates to enable measurements from both sides of the sample is proposed. To demonstrate the efficacy of this approach, a combination of variable-angle spectroscopic ellipsometry and spectrophotometry at near-normal incidence was employed to optically characterize three inhomogeneous polymer-like thin films. The spectral dependencies of the optical constants were modeled using the Kramers–Kronig consistent model. It was found that it is necessary to consider thin, weakly absorbing transition layers between the films and the substrates. The obtained results show excellent agreement between the fits and the measured data, providing validation of the structural and dispersion models, as well as the overall characterization procedure. The proposed approach offers a method for optically characterizing a diverse range of inhomogeneous thin films, providing more reliable results when compared to traditional one-sided measurements.
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