doc. Mgr. Pavel Dvořák, Ph.D.
Associate professor, Plasma Diagnostics and Modelling
Office: pav. 06/01028
Kotlářská 267/2
611 37 Brno
Phone: | +420 549 49 3837 |
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Total number of publications: 162
2010
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Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling
Year: 2010, type: Conference abstract
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Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
Journal of Physics D: Applied Physics, year: 2010, volume: 43, edition: 50
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Diagnostics of reactive magnetron sputtering
Year: 2010, type: Conference abstract
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Diagnostics of reactive magnetron sputtering
Year: 2010, type:
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Higher harmonic frequencies in capacitive discharges
Bulletin of the American Physical Society 55 (2010), CTP142, year: 2010
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Higher harmonic frequencies in capacitive discharges
63rd GEC and 7th ICRP - Conference Proceedings, year: 2010
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Measurement of plasma potential waveform by an uncompensated probe
Plasma Sources Sci. Technol., year: 2010, volume: 19, edition: 2
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Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages
Plasma Sources Sci. Technol., year: 2010, volume: 19, edition: 5
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Monitoring of PVD, PECVD and etching plasmas using Fourier components of RF voltage
Plasma Physics and Controlled Fusion, year: 2010, volume: 52, edition: 12, DOI
2009
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Harmonic analysis of discharge voltages as a tool to control the RF sputtering deposition process
Europhysics Letters, year: 2009, volume: 85, edition: 1