prof. Mgr. Petr Vašina, Ph.D.
Department head, Department of Plasma Physics and Technology
Office: pav. 06/01025
Kotlářská 267/2
611 37 Brno
Phone: | +420 549 49 6479 |
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social and academic networks: |
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Total number of publications: 381
2010
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Higher harmonic frequencies in capacitive discharges
63rd GEC and 7th ICRP - Conference Proceedings, year: 2010
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Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions
Year: 2010, type: Conference abstract
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Impact of neutral gas temperatures on reactive magnetron sputtering
Potential and Applications of Thin Ceramic and Metal Coatings, year: 2010
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Influence on surface morphology by plasma-surface interaction between Al film and atmospheric pressure DCSBD plasma
Year: 2010, type: Conference abstract
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Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages
Plasma Sources Sci. Technol., year: 2010, volume: 19, edition: 5
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Monitoring of PVD, PECVD and etching plasmas using Fourier components of RF voltage
Plasma Physics and Controlled Fusion, year: 2010, volume: 52, edition: 12, DOI
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Plasma diagnostics using electron paramagnetic resonance
Journal of Physics D: Applied physics, year: 2010, volume: 43, edition: 12
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Preparation of self-adhesive nc-TiC/a-C:H coatings
Potential and Applications of Thin Ceramic and Metal Coatings, year: 2010
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Suppressed hysteresis behaviour of Ti sputtering in acetylene gas
Year: 2010, type: Conference abstract
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Time resolved investigations of high power pulsed microwave discharge in nitrogen and neon
Proceedings of 24th Symposium on Plasma Physics and Technology, year: 2010