prof. Mgr. Petr Vašina, Ph.D.
Department head, Department of Plasma Physics and Technology
Office: pav. 06/01025
Kotlářská 267/2
611 37 Brno
Phone: | +420 549 49 6479 |
---|
social and academic networks: |
---|
Total number of publications: 381
2008
-
Evolution of N and O atom densities for oxygen admixture added into nitrogen afterglow
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, year: 2008
-
Harmonic analysis of discharge voltages as a tool to control RF sputtering deposition process
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, year: 2008
-
High power pulsed microvawe discharge: theory and experiment
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, year: 2008
-
Influence of N2 and CH4 on deposition rate of boron based thin films prepared by magnetron sputtering
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, year: 2008
-
Influence of N2 and CH4 on depositon rate of boron based thin films prepared by magnetron sputtering
Chemické listy, year: 2008, volume: 102, edition: 1
-
Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses
Book of Abstracts, Second Central European Symposium on Plasma Chemistry, year: 2008
-
Limits for H, N, O and O2 Detection by Means of Electron Paramagnetic Resonance
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, year: 2008
-
Measurement of Fundamental and Higher Harmonic Frequencies as Tool to Control RF Sputtering Deposition Process
Programme and Abstract Book of the 23rd Symposium on Plasma Physics and Technology, year: 2008
-
Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, year: 2008
-
Modeling of reactive sputtering process with non-linear discharge current density
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, year: 2008