Mgr. Peter Klein, Ph.D.
Výzkumný pracovník II, Deposition of Thin films and Nanostructures
Total number of publications: 86
2023
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Describing the multipulse HiPIMS deposition
Year: 2023, type:
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Dynamics of sputtered particles in multipulse HiPIMS discharge
Plasma Sources Science and Technology, year: 2023, volume: 32, edition: 4, DOI
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Enhancing the ionized metal flux fraction in industrial conditions
Year: 2023, type: Conference abstract
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Investigation of ionized metal flux fraction at industrial conditions
Year: 2023, type: Conference abstract
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NOVEL INDUSTRIAL SPUTTERING TECHNOLOGY WITH VERY HIGH IONIZED FLUX FRACTION OF DEPOSITED MATERIAL
Year: 2023, type: Conference abstract
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Novel Sputter Cathode Design to Obtain Very High Ionized Flux Fraction of Deposited Material in Industrial Conditions
Year: 2023, type: Conference abstract
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On spokes in reactive Ar/N2 atmosphere using HiPIMS
Year: 2023, type: Conference abstract
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Ověřená technologie - prediktivní simulace ta-C procesu
Year: 2023
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Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS
Plasma Sources Science and Technology, year: 2023, volume: 32, edition: 7, DOI
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Time and Energy-Resolved Investigation of the HiPIMS Discharge in Ar and Ar/N2 Atmospheres
Year: 2023, type: Conference abstract