Publication details
Finite Element Method Simulations of Hydrogen Plasma in a Linear Antenna Microwave Plasma Source for Deposition of NCD Films
| Authors | |
|---|---|
| Year of publication | 2012 |
| Type | Article in Proceedings |
| Conference | Potential and Applications of Surface Nanotreatment of Polymers and Glass: Book of Extended Abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | finite element method, simulation, plasma, NCD, microwave plasma, hydrogen plasma |
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