Publication details

On sputtered particle distribution towards substrate during target erosion - simulation and experiment

Authors

KLEIN Peter VAŠINA Petr SCHMIDTOVÁ Tereza

Year of publication 2013
Type Article in Proceedings
Conference PAPN 2013: Book of extended abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Sputtering; Magnetron; Monte Carlo simulation; Compound material
Description It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state. Using Monte Carlo simulation optimal conditions for reproducibly depositing thin layer were calculated.
Related projects: