Publication details
On sputtered particle distribution towards substrate during target erosion - simulation and experiment
| Authors | |
|---|---|
| Year of publication | 2013 |
| Type | Article in Proceedings |
| Conference | PAPN 2013: Book of extended abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Sputtering; Magnetron; Monte Carlo simulation; Compound material |
| Description | It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state. Using Monte Carlo simulation optimal conditions for reproducibly depositing thin layer were calculated. |
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