Publication details
Spoke induced cathode voltage and discharge current oscillations in HiPIMS
| Authors | |
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| Year of publication | 2015 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | The oscillations were observed on cathode voltage and discharge current temporal evolution in HiPIMS pulse. The frequency of the oscillations depends at given pressure only on actual value of the discharge current. Rotation of the spokes over the cathode and the frequency of the oscillations shows different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges. |
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