Publication details

Temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge

Authors

FEKETE Matej HNILICA Jaroslav VAŠINA Petr

Year of publication 2015
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Number densities of sputtered Ti atoms and ions in their ground levels were determined by developed technique based on effective branching fractions. Densities were determined for single pulse,sequence of pulses and after the end of the pulse.
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