Publication details

Effect of pulse off time on temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge

Authors

FEKETE Matej HNILICA Jaroslav VAŠINA Petr

Year of publication 2015
Type Article in Proceedings
Conference Potential Application of Plasma and Nanomaterials 2015
MU Faculty or unit

Faculty of Science

Citation
Web https://munispace.muni.cz/index.php/munispace/catalog/book/792
Field Plasma physics
Keywords HIPIMS; OES; titanium
Description The aim of this paper is to experimentally study effect of preceding pulse on the temporal evolution of number densities of sputtered species during the subsequent pulse for different delay time between two successive high-power pulses in the pulse packet. Time evolutions of sputtered species during and after pulse in single-pulse mode are presented, too. Intensities of selected lines of buffer gas were acquired during every measurement.
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