Publication details

Ellipsometry of surface layers on a 1-kg sphere from natural silicon

Authors

KLENOVSKÝ Petr ZŮDA Jaroslav KLAPETEK Petr HUMLÍČEK Josef

Year of publication 2017
Type Article in Periodical
Magazine / Source Applied Surface Science
MU Faculty or unit

Faculty of Science

Citation
Doi http://dx.doi.org/10.1016/j.apsusc.2016.08.135
Field Solid matter physics and magnetism
Keywords Silicon; Surface layers; Ellipsometry; 1-kg mass standard
Description We have investigated surface layers on a monocrystalline float-zone, n-type ( 2400-2990 Ohm.cm) sphere with the diameter of 93.6004 mm. Ellipsometric spectra in the visible-ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1-6 mu m grits; the overlayers were examined by mid-infrared ellipsometry, including the range of polar vibrations of the Si O bonds. AFM measurements on the sphere were used to test the models of its surface. (C) 2016 Elsevier B.V. All rights reserved.
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