Publication details

Spokes occurrence in HiPIMS discharge at different magnetic field strengths

Authors

HNILICA Jaroslav ŠLAPANSKÁ Marta KLEIN Peter FEKETE Matej VAŠINA Petr

Year of publication 2017
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description The effect of magnetic field strength on spoke behavior was studied by high-speed camera imaging and optical emission spectroscopy (OES) in HiPIMS discharge using 3-inch titanium target. The spoke shape, number of spokes and spoke rotation velocity were observed by employed camera. The camera enabled us to record two successive images in the same pulse with time delay of 3µs between them. The time-resolved measurements of chosen Ti atom, Ti ion, Ar atom and Ar ion lines were made. The experimental conditions covered discharge current up to 350 A, pressure range of 0.15-5 Pa and magnetic fields strength of 37, 72 and 91 mT.
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