Publication details
Transition from spokes into a homogeneous plasma in HiPIMS discharge
| Authors | |
|---|---|
| Year of publication | 2017 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | The transition from self-organized plasma into spokes to a homogeneous plasma was studied. In the experiment, the 51-mm-diameter chromium target was used. The transition was investigated by simple biased flat probe, mass spectrometry (MS) and optical emission spectroscopy (OES). |
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