Publication details

Impact of Sputtered Species Ionization on Hysteresis Curve Shape – Model and Experiment

Authors

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Year of publication 2017
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description During the last decade the HiPIMS has shown great promise in the field of reactive thin film deposition. In the reactive HiPIMS (R-HiPIMS), the discharge power is delimited within short energetic pulses which, in addition to an enhanced ionization of the sputtered species, also leads to an enhanced dissociation of the reactive gas molecules resulting in an increasing gas reactivity with the surface, which is ultimately beneficial for the thin film formation.
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