Publication details

Evolution of Titanium Atom and Ion Density in Reactive HiPIMS - Impact on Hysteresis Curve Shape

Authors

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Year of publication 2017
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Likewise as the reactive dc or pulsed-dc sputtering, the R-HiPIMS undergoes hysteresis behaviour, however the hysteresis may be minimised or even suppressed by optimizing the R-HiPIMS process parameters. The exact mechanism behind the hysteresis suppression is still unknown and therefore this issue is yet highly disputed in the scientific community. In this paper, we report the evolution of the sputtered Ti atom and ion ground state densities in R-HiPIMS for both nitrogen and oxygen gasses.
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