Publication details

Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS

Authors

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Year of publication 2017
MU Faculty or unit

Faculty of Science

Citation
Description The shape of the hysteresis curve in R-HiPIMS was noticeable different from that one of dc magnetron sputtering operation at the same mean power – the transition from the metallic to compound mode and vice versa were shifted to lower reactive gas supply and the width of the hysteresis curve was reduced. These changes were more pronounced for R-HiPIMS processes with higher ionized fraction of the sputtered species. The modified Berg model assuming that a part of the sputtered and ionized species are back-attracted to the target was developed.
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