Publication details

Titanium Atom and Ion Number Density Evolution in Reactive High Power Impulse Magnetron Sputtering

Authors

FEKETE Matej LUNDIN Daniel BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Year of publication 2018
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description The hysteresis curve in R-HiPIMS generally exhibits a narrower shape compared to dcMS, or it can even be entirely suppressed, which is beneficial for high-rate deposition of stoichiometric compound films. However, the main effect behind the hysteresis suppression is not yet completely understood. We report on evolutions of titanium atom, and ion ground state densities in R-HiPIMS discharges in oxygen for constant mean power and pulse duration, when varying the repetition frequency.
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