Publication details

Space-resolved evolution of sputtered species number densities in HiPIMS and DCMS discharge



Year of publication 2018
Type Conference abstract
MU Faculty or unit

Faculty of Science

Description Magnetron sputtering is a physical vapor deposition technique used in the whole spectrum of industrial applications; thus, it is crucial to characterize the process behavior thoroughly. The analysis of non-reactive Direct Current Magnetron Sputtering (DCMS) and High Power Impulse Magnetron Sputtering (HiPIMS) in the presented study is performed using a Quartz Crystal Monitor (QCM) and Optical Emission Spectroscopy (OES). The QCM system can be equipped with biasable grids or a gridless sensor with magnetic electron filter, and it is used to measure separately the flux of atoms and of the ionized particles impinging the substrate. A spectroscopic method utilizing self-absorption of the plasma and Effective Branching Fractions (EBF) is employed to evaluate the absolute ground state titanium atom and ion number densities. A systematical study on three discharge parameters – working pressure, duty cycle and distance from the titanium target - is presented. The study is realized at three different distances from the target – in the magnetized plasma region, between the target and the substrate and at the substrate level. The investigation is performed at a constant mean power and pulse duration. Both the titanium atom and titanium ion number densities are correlated with the overall atom and ion deposition fluxes at the substrate level, respectively.
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