Publication details

Higher harmonic frequencies in a capacitively coupled plasma

Authors

DVOŘÁK Pavel ŽEMLIČKA Radek PŘIBYL Roman TKÁČIK Maroš PÁLENIK Juraj VAŠINA Petr SKOPAL Petr NAVRÁTIL Zdeněk BURŠÍKOVÁ Vilma

Year of publication 2021
MU Faculty or unit

Faculty of Science

Citation
Description Nonlinear nature of sheaths leads to nonlinear VA characteristics and generation of higher harmonic frequencies in capacitively coupled discharges. Higher harmonic frequencies are known to influence heating of electrons, especially at low pressure, and to be very sensitive to number of discharge parameters, which enables to use higher harmonics for monitoring of various deposition and etching processes. The presentation summarizes the topic of probe measurements of higher harmonic frequencies of plasma potential, nonlinear modeling of behaviour of higher harmonic frequencies in capacitive discharges and explanation of the mechanism which leads to the sensitive reaction of higher harmonics on the presence of a deposited or etched thin film.
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