Publication details
Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions
| Authors | |
|---|---|
| Year of publication | 1998 |
| Type | Paper in proceedings |
| Conference | 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | mechanical properties; thin Films; PECVD |
| Description | Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions |