Publication details
Apparatus for mapping 8-inch wafers using optical fiber spectrometer
| Authors | |
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| Year of publication | 2026 |
| Type | Prototype, functioning sample |
| MU Faculty or unit | |
| Attached files | |
| Description | The device is used for spectroscopic mapping of optical properties in transmitted light. The setup allows for mapping of wafers up to 8 inches (200 mm) in diameter. Its primary application is mapping the homogeneity of wide-bandgap semiconductor wafers. The optical properties are influenced by the concentration of impurities. Optical spectroscopy is a non-contact and non-destructive method. It also enables rapid measurements, and the device is relatively simple, yet it provides a wealth of information about the samples being studied. |