Publication details
Study of reaction between HMDSO and O atoms in afterglow
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | Proceedings of ISPC 14 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | plasmachemical reaction; HMDSO; EPR |
| Attached files | |
| Description | In this work the kinetics of reactions between atomic oxygen and HMDSO was studied. Rate constant was measured by means of electron paramagnetic resonance spectroscopy. |
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