Spatial Distribution of Species in an IPVD reactor

• Authors: BUBLAN Martin; VAŠINA Petr; DE POUCQUES Ludovic; BOISSE-LAPORTE Caroline; IMBERT Jean-Christophe; TOUZEAU Michel
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: WDS 03 Proceeding of Contributed Papers
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: optical emission spectroscopy; optical absorption spectroscopy; IPVD; magnetron
• Description: Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too.

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