Recent Developments on Ionized Physical Vapour Deposition: Concepts, Determination of the Ionization Efficiency and Improvement of Deposited Films

• Authors: BRETAGNE Jean; DE POUCQUES Ludovic; BOISSE-LAPORTE Caroline; GOUSSET Gerard; HUGON Marie-Christine; IMBERT Jean-Christophe; LEROY Olivier; TEULÉ-GAY Lionel; TOUZEAU Michel; VAŠINA Petr
• Year of publication: 2004
• Type: Chapter of a book
• MU Faculty or unit: Faculty of Science
• Description: While most of IPVD reactors use radio frequency coil to create additional ionization, we developed an alternative technique in which the ionization of the emitted sputtered vapor is archived by two microwave antennas. Langmuir probe measurement were used to determine electronic density and temperature. Optical emission and absorption spectroscopy has been performed to determine the ionized fraction of the sputtered vapour. Preliminary results are also given for a conventional IPVD system used for the deposition of Ti-based biomaterials.