Publication details
Fast dynamics of ionized species in high power pulsed magnetron discharge
| Authors | |
|---|---|
| Year of publication | 2004 |
| Type | Article in Proceedings |
| Conference | Bulletin of the American Physical Society, Series II, Vol. 49, No. 5 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | preionization; pulsed magnetron discharge; copper |
| Description | A high power density 1kW/cm2 preionized pulsed magnetron plasma was investigated. Applied voltage of 1 kV caused fast magnetron current increase, and, after few microseconds, dense plasma was formed characterized by a pressure independent value of 40 A for a 3 cm copper cathode. For times higher than 5 microsecond, plasma composition was dominated by metal ions and selfsputtering process took place. |
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