Publication details
Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Periodical |
| Magazine / Source | Surface and Coating Technology |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | IPVD; sputtering; magnetron discharge; microwave discharge; RF discharge; absorption spectroscopy |
| Description | Comparison of two sources of ionisation in an IPVD reactor, microwave and RF discharge. |
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