Publication details
Influence of methane on capacitively coupled oxygen discharge
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Proceedings |
| Conference | 16th Symposium on Application of Plasma Processes - Book of Abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | oxygen; methane; capacitively coupled; plasma |
| Description | In this work the mixture of oxygen and a small amount (0-5%) of methane was studied. The measurements were carried out in low-pressure (6.5 Pa) capacitively coupled RF discharge. Positive ions and neutral particles were detected by mass spectrometer and ion energy analyzer. O2+ was the dominating ion in the discharge. Its amount was significantly decreased when a small amount of methane was added. H3O+ and carbon containing ions as C2H7+, CHO+ (C2H5+), CH3+ and CO+ were consequently detected. The flux of neutral particles were composed of dominant O2 which decreased with increasing amount of methane, and expected important product species as H2O, CO2 and CO. |
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