Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma

• Authors: GRANIER A.; BEGOU T.; DUQUENNE C.; DJOUADI M.A.; FENG X.; BURŠÍKOVÁ Vilma; ZAJÍČKOVÁ Lenka
• Year of publication: 2007
• Type: Article in Proceedings
• Conference: 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: DLC;PECVD;HMDSO;mechanical properties
• Description: Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma

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