Publication details

Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions

Authors

SCHMIDTOVÁ Tereza VAŠINA Petr SOUČEK Pavel

Year of publication 2010
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions. No hysteresis effect was observed and modelled.
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