Publication details
Oxygen Precipitation in CZ Si Wafers after High Temperature Pre-annealing
| Authors | |
|---|---|
| Year of publication | 2010 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | In this work we study two stage and three stage annealing processes with application of Tabula rasa. The evolution of precipitates at various phases during annealing process for various temperatures was obtained from series of experimental techniques. |
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